Nanofabrication of semiconductors, metals, and other electronics materials is indispensable for electronics, photonics, and bio-research, and cleanrooms are an indispensable infrastructure for minimizing contamination of fabricated devices with impurities and defects. In the cleanrooms at our institute, which have an area of larger than 1,000 m², state-of-the-art nanofabrication facilities for realizing nanotransistors, nanophotonic structures, power devices, and MEMSs (oxidation, epitaxy, thin film deposition, ion etching, electron beam lithography, etc.) are in operation.