Facilities
Cryogenic Service Room
Cryogenic Service Room

Cryogenic Service Room supplies cryogenic liquids (liquid helium and liquid nitrogen), dry nitrogen gas, and deionized water, which are indispensable ingredients for research activities on semiconductor technologies, material sciences, and biotechnologies at IIS. The room operates a helium liquefaction system capable of producing 110 L/h of liquid helium. It also possesses two 11,000 L liquid nitrogen storage tanks. Because security is important when handling cryogenic liquids, the room offers tutorials to researchers and students. Further, the room operates a large-capacity water purifier and supplies high quality deionized water throughout IIS.