Facilities
Cryogenic Service Room
Cryogenic Service Room

Cryogenic Service Room supplies cryogenic liquids (liquid helium and liquid nitrogen), dry nitrogen gas, and deionized water, which are indispensable ingredients for research activities on semiconductor technologies, material sciences, and biotechnologies at IIS. The room runs a helium liquefier/recovery system, which was renewed in 2010 and can produce liquid helium at a rate of 65L/hr, and possesses two 11,000L liquid nitrogen storage tanks. Because security is important when handling cryogenic liquids, the room offers tutorials to researchers and students. Further, the room operates a large-capacity water purifier and supplies high quality deionized water throughout IIS.