Photochemical vapor deposition by optical near field toward nanometric photonic integration

M. Ohtsu

Tokyo Institute of Technology
ERATO Localized Photon Project, JST

We review recent progress of application of interactions between optical near-fields and nanoscale materials. Photochemical vapor deposition of nanometeric Zn and Al are realized by using an UV optical near-field. Deposition of nanoscale ZnO is also shown. Utilizing the very advanced potential of this technology, the concept of nano-photonic IC is proposed. Nano-photonic switching operation utilizing optical near-field interaction is also proposed and related spectroscopy of CuCl quantum dots are demonstrated.