AFM Nanolithography on Mixed LB Films with Hexadecylamine and Palmitic Acid

Yun Kyeong Jang, Seung Ae Kim, Sang Jung Ahn, Eung Ryul Kim, and Haiwon Lee

Department of Chemistry, Hanyang University, Seoul, 133-791, Korea

The Langmuir monolayer of mixed hexadecylamine (HDA) and palmitic acid (PA) were prepared on the air-water interfaces in 1:1 molar ratio and then transferred to on Si surfaces for the fabrication of nano-sized patterns. The analysis of vibrational spectroscopy on the transferred LB films indicated that all acid groups of PAs were deprotonated and amine groups of HDAs were protonated by acid-base reaction. The trend of anodization reaction between tip and Si surface on the various controlled conditions such as scanning tip velocity, applying voltage, and applying tip pressure was investigated.