Nanolithography on Organic Resists Using Atomic Force Microscope

Haiwon Lee and Eung Ryul Kim

Department of Chemistry, Hanyang University, Seoul, 133-791, Korea

Self-assembled monolayers of organosilanes and bipolar amphiphiles together with Langmuir-Blodgett films have been fabricated by AFM anodization lithography. AFM has demonstrated the potentiality for local modification of various surfaces using different approaches such as exposure of molecular resists and selective anodic oxidation of various substrates. The lithographic results strongly suggest that AFM anodization on ultrathin organic films is clearly affects by the type of molecular structures, so the designing of molecules with functional groups is one of important factors for patterning in nano-scale.