Dynamic properties of single crystal silicon nanocantilevers

S. Kawai, K. Fukushima, A. Kato, D. Saya, H. Toshiyoshi, H. Fujita, and H. Kawakatsu

Institute of Industrial Science, University of Tokyo, Komaba4-6-1, Meguro-ku, Tokyo153-8505

We have succeeded in fabricating single crystal silicon nanocantilevers with a tip for improved force and mass resolution in scanning force microscopy (SFM). The cantilevers have lengths ranging from 3 to 10ｵm, and thickness from 30 to 100 nm. We have verified the cantilevers of the static and dynamic mechanical properties under atmospheric pressure and vacuum. The aim of this research is to verify the cantilevers as a tip of noncontact SFM in vacuum. We will report on a scheme of a SFM system with the cantilevers. The Q factor and spring constants were 104 and 5 N/m, respectively.