Toward parallel activation and readout of Millions of Cantilevers

A. Kato, M,Nagashio* D.Saya, D,Kobayashi*, H.Fujita, and H.Kawakatsu

Institute of Industrial Science, University of Tokyo, Komaba4-6-1, Meguro-ku, Tokyo153-8505
*Tokyo Denki University, Kanda-Nishikimachi 2-2, Chiyoda-ku, Tokyo 101-8457

We have reported the fabrication of a two-dimensional cantilever array utilizing the anisotropic etching of single crystal silicon and its mechanical testing. We are exploring a multi-probe Atomic Force Microscopy (AFM) using the cantilever arrayfor parallel imaging. The results of the preliminary experiments toward parallel activation of the cantilevers on the array and readout of their displacement are presented. Surface acoustic wave (SAW) was designed to have the same frequency of the cantilever resonance. The SAW pulses were sent to the rows to excite and amplify the resonance vibration of cantilevers in the order of MHz. Optical readout schemes were arranged to verify the interfer-ometric measurement. The change of optical interference corresponding to the displacement of the cantilevers was tested.