Encoding of a crystalline lattice as a scale reference at over 10 ｵm/s

Y. Hoshi, T. Kawagishi and H. Kawakatsu

Institute of Industrial Science, University of Tokyo,
4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JAPAN

Fast readout of crystalline lattices is important for implementing a practical metrological application of scanning probe microscopy (SPM) calibrated by crystalline periodicity. Observation of highly oriented pyrolytic graphite by a frictional force microscope (FFM) gave clear regularity of a stick-slip signal reflecting crystal periodicity even at tip velocities over 20ｵm/s, whereas 1ｵm/s was the maximum for mica. For evaluating the error of this method, the numbers of the stick-slips were compared with the wavelength of a laser interferometer. The crystalline orientation was chosen to minimize zigzag motion of the atomic stick-slip. Results of comparison between lattice counting and interferometry will be reported.